Fabrication of Nanoimprint stamps for photonic crystals
نویسندگان
چکیده
منابع مشابه
Fabrication of 2-D photonic crystals using azo polymers
In this paper, we have reported the fabrication of two-dimensional photonic crystals, using a direct writing method in azo polymers. Periodic structures have been fabricated using the interference patterns of two coherent laser beams. The frequency response of the initial one-dimensional structure shows an attenuation of 19.3dB at 1554nm. The twodimensional structure shows 8.3dB and 11.3dB of a...
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In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fabricating the stamp using stencil lithography, which has the potential for a cost reduction in some fabrication facilities. We show that the ...
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Nanoimprint lithography (NIL) is a compelling technique for low cost nanoscale device fabrication. The precise and repeatable replication of nanoscale patterns from a single high resolution patterning step makes the NIL technique much more versatile than other expensive techniques such as e-beam or even helium ion beam lithography. Furthermore, the use of mechanical deformation during the NIL p...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2006
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/34/1/149